Installing The Swm On A Wafer Prober; Automatic Wafer Probers; Manual And Small Automatic Wafer Probers - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
Table of Contents

Advertisement

Installing the SWM on a Wafer Prober

The prober manufacturer and the customer are responsible for mounting the HP 4085B/F
onto your wafer prober, and subsequent adjustment and service. Hewlett-Packard will,
however, provide technical assistance regarding SWM installation upon request. Contact your
nearest HP Service Oce for assistance.

Automatic Wafer Probers

Before you can install your SWM and HP 16072 Personality Board onto your wafer prober,
mounting hardware|hinge, head plate, and so on|must be fabricated. For this purpose, the
dimensions and other mechanical speci cations for the SWM and the personality boards are
provided in the
Pre-installation Manual
Keep hands clear of the SWM, hinge, and wafer prober when lowering the SWM
Warning
into position on your wafer prober.
Do not touch the measurement pins of the SWM or the printed patterns of the
Caution
personality board. Oil, perspiration and dirt prevent good electric contact,
deteriorate insulation, and degrade measurement accuracy.
After you have installed the HP 16072F Personality Board on your wafer
Note
prober, adjust the position of the personality board so the pin board numbers
printed on the personality board line up with the corresponding numbers on
the SWM. Con rm that all the measurement pins of the SWM are making
good electric contact with the pin contacts of the personality board.

Manual and Small Automatic Wafer Probers

Because the SWM cannot be installed directly on the manual wafer probers or small
automatic wafer probers, you need the Extension Cable Fixture (HP 16077A for HP 4085B
SWM or HP 16077F for HP 4085F SWM) to connect the SWM to the manipulator or probe
card of the prober.
The extension cable xture installs onto the SWM and is secured in place by four thumb
screws. Wires from the manipulator or probe card of the prober can then be soldered to the
measurement pins of the extension cables xture. Figure 3-3 shows the extension cable xture
with its protective cover plate installed.
For more information on the HP 16077A/F Extension Cable Fixture, refer to the HP
16077A/F
Operation Manual
Potentially hazardous voltages may be present at the measurement pins of the
Warning
extension cable fixture when the output enabled lamp on the SWM is lit. Make
sure the protective cover plate of the extension cable fixture is installed before
you operate the system.
3-4 Switching Matrix Installation
.
.

Advertisement

Table of Contents
loading

This manual is also suitable for:

Hp 4062f

Table of Contents