Calibration Module Menu Page - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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2. To verify or change the calibration values of the system calibration module, select the
softkey. Refer to the
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Reconfig
system calibration module for the correct calibration values.
To display a brief operating guide, select the
menu page, select the
If this step is not required, go to step 3.
a. The calibration module menu page shown in Figure 6-30 shows the product number
of the calibration modules: \16346A," \16346B," and \16346C". Hewlett-Packard
recommends using the HP 16346B for performance veri cation of the HP 4085F SWM.
If your system is equipped with an HP 4284A CMU84, an HP 16346C is also required.
Select the desired softkey of the product number according to your system instrument.
For example, if your system is equipped with an HP 4284A CMU84, select the
softkey and modify the calibration data, then select
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16346B
modify the calibration data.
d
c
CALIBRATION REPORT
softkey.
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Return
-----------------------------------
HP 4062F PERFORMANCE VERIFICATION
-----------------------------------
Calibration Modules:
16346A : SMU TEST, VS TEST, VM TEST, AFU TEST,
CMS C-G TEST, CMS BIAS TEST
16346B : SMU TEST, VS TEST, VM TEST, AFU TEST,
CMS C-G TEST, CMS BIAS TEST
16346C : CMU84 C-G TEST, CMU84 BIAS TEST
Select a System Calibration Module for the calibration data entry.
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16346A
16346B
16346C
Figure 6-30. Calibration Module Menu Page
sheet furnished with the
softkey. To return to the startup
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Help
User 1
Caps
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softkey and
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16346C
a
Running
Start-up
b
Menu
System Verification 6-29

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