Procedure - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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Procedure:

1. Select the
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4062UX W/O DVM
After selectiong the
minute.
When START nishes, a con guration page of START similar to that shown in Figure 6-1
is displayed for less than a second, and the start-up menu page as shown in Figure 6-5
appears on the screen.
If your HP 4062UX system is equipped with a CMU84, the
also displayed. When you select this softkey, the CMU84 performs the OPEN and SHORT
correction. Refer to the HP 4284A
Do not touch the measurement pins of the SWM or the contact pads of the
Caution
relay test adapter with bare hands. Oil, perspiration, and dirt prevent good
electrical contact and degrade measurement accuracy.
d
c
2. To verify or change the calibrated values of the system calibration module, select the
softkey. The program displays the RECONFIG page, which shows the
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Reconfig
presently set system calibration module and its calibrated values. Refer to the data sheet
furnished with the system calibration module for the correct calibrated values.
To display a brief operating guide, select the
menu page, select the
If this step is not required, proceed to step 6.
3. The calibration module menu page shown in Figure 6-6 shows the product number of the
calibration modules. For a 48-pin SWM system, \16346A," \16346B," and \16346C" is
softkey.
softkey, the START program runs for about one
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4062UX W/O DVM
Operation Manual
Figure 6-5. 4062UX W/O DVM Test Startup Page
softkey.
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Return
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HP4284A Corr.
for details.
softkey. To return to the startup
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Help
softkey is
System Verification 6-9
a
b

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