Running Pv4062.F; Pv4062.F Menu Page (Hp 4062F) - HP 4062UX Installation Manual

Semiconductor process control system semiconductor parametric test system
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Running PV4062.F

To start PV4062.F, perform the following procedure:
1. Turn the system controller on and boot the HP-UX system.
2. Log in as a superuser.
3. Change the current directory to the /usr/pcs/diag directory as follows:
# cd /usr/pcs/diag
4. Enter the HP BASIC/UX environment as follows:
# rmb
5. Load and run the PV4062.F program as follows:
LOAD "PV4062.F"
RUN
4 Return 5
PV4062.F main menu page is displayed as shown in Figure 6-28.
SELECT SOFTKEY
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4062F DC
c
W/O DVM
6. Install the HP 16066A test xture adapter on the SWM.
The test xture adapter (with no test xture installed) is used to hold the
Note
WAFER PROBER SENSE switch closed during this test (to enable the
SWM). If the test xture adapter is not available, press and hold the WAFER
PROBER SENSE switch during this test.
The WAFER PROBER SENSE switch detects wherer or not the switching matrix
Warning
is positioned (lowered) atop the prober and enables output voltage or current
from the measurement pins. If the WAFER PROBER SENSE switch is pressed,
dangerous dc voltage exceeding
pins. Severe electrical shock will results if pins are touched.
6-26 System Verification
4 Return 5
or select the
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4062F DC
4142B
4062F AC
W/ DVM
Figure 6-28. PV4062.F Menu Page (HP 4062F)
softkey
NNNNNNNNNNN
RUN
User 1
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START
VIEW
RESULT
6
42 V may be present at the measurement
Running
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END
b

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