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4.4.2 Troubleshooting of Options
Symptom
No.
(Error message)
1
Liquid leaks from valve
2
VALVE 1 ERROR (1)
PRESS "CL" KEY TO
CLEAR MESSAGE
3
VALVE1 ERROR (2)
PRESS "CL" KEY TO
CLEAR MESSAGE
4
VALVE IS NOT
CONNECTED
CHECK CONNECTION
THE VALVE
If a fault is noticed in an optional component, take a remedy with
reference to the table below.
Cause
1. Stator retaining screws
of valve are loose
2. Seal is worn
3. Tubing not connected
correctly
4. Flow path tubing is
clogged
1. Valve seal not attached
correctly
2. Faulty operation of
valve 1
Faulty operation of valve-1
control circuit board
Valve connection error
4 - 13
Remedy
1. Retighten the stator retaining
screws.
2. Replace the seal.
3. Retighten the tubing
connections, and if leakage
persists, replace the tubing.
4. Detach tubing from the valve
section downward and locate
faulty part.
1. Attach the seal correctly.
2. Turn on valve power again, and
make sure the valve is changed
over correctly.
Turn on valve power again. If this
error occurs repeatedly, notify your
nearest service office of Hitachi
High-Technologies Corporation
sales representative.
Correct valve setting (used/not
used).
4.4.1
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Troubleshooting
