(3) Insert the hexagon wrench into the two shafts and rotate it approximately 30 degrees in the
counterclockwise direction (3).
The shafts turn the half-locked state.
(4) Align the display unit in the Z direction.
Measuring device: Monitor of unit alignment tool
Adjustment device: Eccentric pin (short) and hexagon wrench
Specification:
t
. "2-4-7. Adjustment Screen of Unit Alignment Tool"
. "2-4-8. Adjustment Mechanism"
. The adjustment in the Z direction is made independently on the right and left sides.
Move the eccentric pin (actually, moving hexagon wrench) individually.
(5) Insert the hexagon wrench into the two shafts, then tighten them by rotating it in the clockwise
direction.
The shafts are locked.
(6) Remove all X positioning tool, eccentric pins (short) and hexagon wrenches.
(7) Check that the specification is met. If the specification is not met, align the display unit in the Z
direction again.
(Refer to steps (1) to (6).)
Measuring device: Monitor of unit alignment tool
Specification:
2-14 (E)
Hexagon wrench
0 ?20 μm
0 ?40 μm
Shaft
ZRD-1/ZRD-2/ZRCT-100/ZRCT-200