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Turbo pump vacuum manifold
The manifold for the turbo pump does not have a baffle or cooling fins. The turbo
pump and the mounting bracket for the turbo controller are clamped directly to
the manifold.
In every other respect, the two manifolds are identical.
Calibration valve port
Vent valve port
Side plate O-ring groove
Front end plate
GC/MSD interface port
Triode gauge port
(behind shield)
Rear end plate
Triode gauge port shield
Vacuum System
5
Turbo pump vacuum manifold
189
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