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r*
a
10706
A
PLANE
MIRROR
X-Y
STAGE
INTERFEROMETER
L
A
r
w
A
+
v
v
I
MIRRORS
10780A
50%
RECEIVER
LASER
C W
PLANE
MIRROR
1
0701
A
l a
BEAM
50%
SPLITTER
10780A
RECEIVER
figure 2-34. Two-Axis Plane Mirror Interferometer Configuration
In applications where the X-Y stage is installed in a vacuum chamber, the configuration in
Figure
2-34 may not be suitable. Figure 2-35 shows a configuration where the laser beam can
enter and exit the vacuum chamber through one window. This allows the receivers to remain
outside the chamber and leaves only the optics inside. For window specifications, refer to the
paragraph on General Considerations for Mounting Optics.
V A C U U M
CHAMBER
10760A
PLANE
M I R R O R
X-Y
STAGE
+
10780A
X
A X l S
B E A M
SPLITTER
10706A
PLANE
M I R R O R
RECEIVER
I N T E R F E R O M E T E R
X
A X l S
WINDOW
Figure 2-35. X-Y Stage Installed in a Vacuum Chamber
The configurations depicted above show typical multiaxis measurement applications and
assume near equal length measurement paths. When dealing with unequal length measure-
ment paths, consideration must be given to balancing the amount of light in each measure-
ment leg. Figure
2-36 shows a measurement configuration in which the distance BD is approxi-
mately three times the distance BC. In this case, it is better to use a
33%
Beam Splitter than a
50% Beam Splitter even though the system is a two-axis configuration.
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Troubleshooting
