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1. Start up
•
Execute the beam alignments in zoom mode. (See the manual above)
•
Place the beam through the hole in the sample and increase magnification to 150kX. Remove all
apertures, center the beam, and go to crossover.
•
Depress [ANA-1] and reset.
2. Correct condenser astigmatism（Magnification : 100K ~ 200K）
•
Using the condenser stigmators (right sub panel) make the caustic as round as possible and using the
3rd order stigmators (left sub panel) make the caustic as symmetrical as possible.
•
The 3rd order correction will be slight and the controls should be close to the center positions. Be sure
to use the correct 3rd order stigmators for the selected mode: TEM and ANA mode.
•
The correctly aligned caustic will appear as a circle with the Star of David in the center in TEM mode
and it has the appearance of the Mercedes-Benz star in Analysis mode.
HITACHI
HF2000 TEM
Operation Manual
- Alignment in Analysis mode
17
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